2015 9th International Conference on Sensing Technology (ICST)
Humidity sensor based on lossy mode resonances on an etched single mode fiber
J. ASCORBE; J.M. CORRES; I.R. MATÍAS; F.J. ARREGUI
Here we present a new structure to fabricate optical fiber sensors. This structure consists on an etched single mode optical fiber coated with a thin film of a semiconductor material by means of sputtering. The optical fiber was etched with hydrofluoric acid until it reaches 19 μm of diameter. Then it was attached to a U-holder and coated with the indium oxide nanocoating. The thin film generates a lossy mode resonance and when the relative humidity increases, the wavelength of the resonance shifts. Changes of 30% to 80% RH have been applied to the device obtaining a wavelength shift of 12 nm.
Link to source: https://ieeexplore.ieee.org/abstract/document/7438424
The CE-SMF was introduced in the vacuum chamber of the sputtering machine, which was a Pulsed DC-Sputtering (Nadetech Inc.) and coated with indium oxide (In2O3)
Keywords: Humidity; Optical fiber sensors; Optical fibers; Sensitivity; Optical fiber communication; Optical interferometry; Lossy mode resonances; Etched optical fiber
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